Temperature-Dependent Elastic Constants of Substrates for Manufacture of Mems Devices

  • Nicholas Ongwen Maseno university
  • Erick Ogam Laboratory of mechanics and acoustics
  • Z. E. A Fellah Laboratory of mechanics and acoustics
  • Henry Otunga Maseno University
  • Maxwell Mageto Masinde Muliro University of Science and Technology
  • Andrew Oduor Maseno University

Abstract

We present a comparative computational study of temperature-dependent elastic constants of silicon (Si), silicon carbide (SiC) and diamond as substrates that are commonly used in the manufacture of Micro-Electromechanical Systems (MEMS) devices. Also mentioned is Cd2SnO4, whose ground-state elastic constants were determined just recently for the first time. Si is the dominant substrate used in the manufacture of MEMS devices, owing to its desirable electrical, electronic, thermal and mechanical properties. However, its low hardness, brittleness and inability to work under harsh environment such as high-temperature environment, has limited its use in the manufacture of MEMS like mechanical sensors and bioMEMS. Mechanical sensors are fabricated on SiC and diamond due to their high Young’s moduli as well as high fracture strength, while the bioMEMS are fabricated on polymers. The effect of temperature on the elastic constants of these substrates will help in giving insight into how their performance vary with temperature.

Author Biographies

Erick Ogam, Laboratory of mechanics and acoustics

Senior Researcher in Mechanics and Acoustics

Z. E. A Fellah, Laboratory of mechanics and acoustics

Senior Researcher in Mechanics and Acoustics

Henry Otunga, Maseno University

Lecturer

Department of Physics and Materials Science

Maxwell Mageto, Masinde Muliro University of Science and Technology

Senior Lecturer

Department of Physics

Andrew Oduor, Maseno University

Professor

Department of Physics and Materials Science

Published
2022-04-25
How to Cite
Ongwen, N., Ogam, E., Fellah, Z. E. A., Otunga, H., Mageto, M., & Oduor, A. (2022). Temperature-Dependent Elastic Constants of Substrates for Manufacture of Mems Devices. Kabarak Journal of Research & Innovation, 12(1), 30-35. Retrieved from http://ojs.kabarak.ac.ke/index.php/kjri/article/view/524